Electronic-grade gas

Acrylic

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The following are the core technical indicators and requirements of electronic grade propylene, which are comprehensively compiled based on semiconductor industry standards and production processes:


1. Basic purity requirements

5N standard (≥99.999%)‌

Purity must be ≥99.995% (volume fraction), total impurities ≤50 ppm, and it is mainly used in the synthesis of optical fibers, liquid crystal displays (LCDs) and high-performance polymers.

Ultra-high purity (>99.9995%)‌

Suitable for semiconductor processes below 28nm (such as photoresist peeling, chip cleaning), the total amount of impurities must be ≤10 ppm.


2. Key impurity limits

Impurity type‌

Limit requirements

Detection method

Hydrocarbon impurities (methane/ethane)‌

≤1–5

Gas chromatography

Propidelene‌

≤0.1

GC-MS combined

Methylacetylene

≤0.1

Gas chromatography-mass spectrometry

Carbon monoxide (CO)‌

≤0.5

Infrared absorption method

Moisture (H₂O)‌

≤1

Karl Fischer

Metal ions (total content)‌

≤1

ICP-MS

Particulate matter (≥0.1μm)‌

≤0.1 units/mL

Laser particle counter

Note: The ultra-high purity grade for semiconductors requires additional control of butene isomers ≤0.05 ppm to prevent residual defects from photoresist.


‌3. Relevance of application scenarios and indicators‌

Semiconductor manufacturing

Lithography process: used for photoresist peeling solvent. Water content >1 ppm will cause oxidation on the wafer surface, and metal ions >1 ppb may cause circuit short circuit.

CVD deposition: When used as a precursor, excessive hydrocarbon impurities will reduce film uniformity.

Display panel packaging

For LCD/OLED packaging glue, propidene residue will accelerate material aging and must be strictly ≤0.1 ppm.

Fiber Optic Coating

High-purity propylene synthetic fiber protective layer, excessive particle size will cause signal transmission loss.


‌4. Packaging and storage and transportation specifications‌

Packaging: 316L stainless steel cylinder is filled, electrolytic polished inside wall, filling pressure ≤1.5 MPa.

Storage: Store below 25℃ from light, and must be continuously filled with nitrogen (oxygen content ≤0.1 ppm).

Safety: Explosion limit is 2.0%~11.1%, and the leakage concentration alarm threshold is set to 1%.


‌5. Testing standards basis‌

Purity and hydrocarbon impurities‌: Perform GB/T 3392-2023 "Determination of hydrocarbon impurities in industrial propylene".

Metal ion detection: Refer to SEMI C10 standard (ICP-MS method).

About 92.8% of the world's electronic grade propylene purity is concentrated in the 99.995% level (5N), and its cost-effectiveness is suitable for large-scale semiconductor production; ultra-high purity (>99.9995%) is limited by process difficulty and has a market share of less than 8%.



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